Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
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!style="background:silver; color:black;" align="center" width="60"|Purpose | !style="background:silver; color:black;" align="center" width="60"|Purpose | ||
|style="background:LightGrey; color:black"|Imaging | |style="background:LightGrey; color:black"| Imaging and measurement of | ||
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* | * Any (semi)conducting sample that may have thin (> ~ 5 µm) layers of non-conducting materials on top | ||
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* | * Any sample except bulk insulators such as polymers, glass or quartz wafers | ||
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* All samples | * All samples | ||
* Bulk insulators such as polymer-, glass or quartz wafers | * Bulk insulators such as polymer-, glass or quartz wafers | ||
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* Samples from the real world | * Samples from the 'real' world outside the lab | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan=" | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance | ||
|style="background:LightGrey; color:black" rowspan="2"|Resolution | |style="background:LightGrey; color:black" rowspan="2"|Resolution | ||
|style="background:Whitesmoke; color:black" colspan="4" | The resolution of a SEM is strongly dependent on the type of sample and the skills of the operator. The highest resolution is probably only achieved on special samples | |style="background:Whitesmoke; color:black" colspan="4" align="center"| The resolution of a SEM is strongly dependent on the type of sample and the skills of the operator. The highest resolution is probably only achieved on special samples | ||
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* 20 nm (limited by instrument) | * 20 nm (limited by instrument) | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="4"|Process parameter range | !style="background:silver; color:black" align="center" valign="center" rowspan="4"|Process parameter range | ||