Specific Process Knowledge/Imprinting: Difference between revisions
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*MVD - ''Molecular Vapor Deposition - Antistiction coater for silicon stamps'' | *MVD - ''Molecular Vapor Deposition - Antistiction coater for silicon stamps'' | ||
*Drop Shape Analyzer - ''Tool to measure the hydrophobicity of the antistiction layer'' | *Drop Shape Analyzer - ''Tool to measure the hydrophobicity of the antistiction layer'' | ||
*Speedline Manual Spinner - ''For spinning of PMMA and Topas'' | |||
*EVG NIL - ''Aligner and imprinting tool'' | *EVG NIL - ''Aligner and imprinting tool'' | ||
*Thyra - ''Home build imprinting tool'' | *Thyra - ''Home build imprinting tool'' | ||