Specific Process Knowledge/Wafer Information: Difference between revisions
| Line 30: | Line 30: | ||
!width="15%" |Thickness | !width="15%" |Thickness | ||
!width="15%" |Resistivity | !width="15%" |Resistivity | ||
|- | |||
!SSP (single side polished) | |||
|bottom | |||
|2" | |||
|P | |||
|500 µm | |||
|1-20 Ωcm | |||
|- | |||
|- | |- | ||
| Line 53: | Line 62: | ||
|N+P | |N+P | ||
|350 µm | |350 µm | ||
|1-20 Ωcm | |1-20 Ωcm | ||
|- | |- | ||
Revision as of 15:42, 8 January 2013
Wafer Information
DTU Danchip has a stock of silicon and glass wafers; the most used of these wafers are located on the wafershelves in cleanroom 2. Whenever you take a wafer from stock, you should buy the wafer from the wafer shop in LabManager. The Price can also be found in the wafer shop.
The waferbox name consists typically of a few letters and a number, eg OP337:
| waferbox name OP337 | ||
| O | P | 337 |
|---|---|---|
| Indicates the company where the wafers are bought | Type of doping in the wafer | shipment number |
Wafers available in DTU Danchips cleanroom
| Wafers available in the cleanroom | |||||
| Shelf | Size | Type | Thickness | Resistivity | |
|---|---|---|---|---|---|
| SSP (single side polished) | bottom | 2" | P | 500 µm | 1-20 Ωcm |
| SSP (single side polished) | bottom | 4" | N+P | 525 µm | 1-20 Ωcm |
| SSP (single side polished) | top | 6" | N or P | 625 µm | 1-20 Ωcm |
| DSP (double side polished) | middle | 4" | N+P | 350 µm | 1-20 Ωcm |
| preprocessed | top | 4" and 6" | |||
| Boron glasswafers | middle | 4" | 1 mm | ||
Wafer boxes and single wafer carriers
New clean wafer boxes and single wafer carriers can be found in the changing area. Ask DTU Danchip personnel for help if stock is low.