Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
No edit summary |
No edit summary |
||
| Line 1: | Line 1: | ||
At the moment we have three SEM's. Together they cover a wide range of needs in the cleanroom: From the fast in-process verification of different process parameters such as etch rates, step coverages or lift-off quality to the ultra high resolution images on any type of sample intended for publication. | At the moment we have three SEM's. Together they cover a wide range of needs in the cleanroom: From the fast in-process verification of different process parameters such as etch rates, step coverages or lift-off quality to the ultra high resolution images on any type of sample intended for publication. | ||
The SEM that will cover most users needs is the [[/Leo|Leo SEM]]. It is a very reliable and rugged | |||
==[[/FEI | FEI SEM]] - ''FEI Nova 600 NanoSEM'' == | ==[[/FEI | FEI SEM]] - ''FEI Nova 600 NanoSEM'' == | ||