Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
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|up to 5900 data points per profile | |up to 5900 data points per profile | ||
|down to 0.067 µm | |down to 0.067 µm | ||
| | |Depending on scan size and number of samples per line and number of lines - accuracy better than 2% | ||
|- | |- | ||
|Resolution z | |Resolution z | ||
|1Å or 25Å | |1Å or 25Å | ||
|1Å, 10Å or 20Å | |1Å, 10Å or 20Å | ||
| | |Infinite - accuracy better than 2% | ||
|- | |- | ||
|Max. scan depth [µm] (as a function of trench width W) | |Max. scan depth [µm] (as a function of trench width W) | ||