Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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The instrument was opened for users in April 2010 when the acceptance test was signed. This was based on the performance of five standard recipes (A, B, C, D and SOI) that are further examined below. The acceptance test report is found [[Media:Pegasus_AcceptanceTest.pdf|here]]. | The instrument was opened for users in April 2010 when the acceptance test was signed. This was based on the performance of five standard recipes (A, B, C, D and SOI) that are further examined below. The acceptance test report is found [[Media:Pegasus_AcceptanceTest.pdf|here]]. | ||
'''Characterisation of etched trenches''' | |||
Comparing differences in etched trenches requires a set of common parameters for each trench. Click [[Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation|here]] to find more information about the parameters used on the DRIE-Pegasus process development. | |||
'''Material from SPTS''' | '''Material from SPTS''' | ||