Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano: Difference between revisions
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{| border="2" cellspacing="1" cellpadding="3" style="text-align:center;" | {| border="2" cellspacing="1" cellpadding="3" style="text-align:center;" | ||
!Recipe Sinano | !Recipe Sinano | ||
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano3|3.0]] | ![[Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/Sinano3|3.0]] | ||
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano31|3.1]] | ![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano31|3.1]] | ||
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano32|3.2]] | ![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano32|3.2]] | ||