Specific Process Knowledge/Etch/ICP Metal Etcher/Aluminium: Difference between revisions
Created page with "=== Aluminium etch === The aluminium etch has two steps: ; Breakthrough : The breakthrough step is designed to break through the native aluminium oxide layer that is present..." |
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!Results | |||
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!Etch rate | |||
|~350 nm/min (depending on features size and etch load) | |||
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