Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300: Difference between revisions
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==IBE/IBSD Ionfab 300: milling, dry etching and deposition in the same tool== | ==IBE/IBSD Ionfab 300: milling, dry etching and deposition in the same tool== | ||
[[Image:IBE_IBSD_udstyret_i_RR1.jpg|500x500px|thumb|IBE IBSD: positioned in cleanroom 1]] | [[Image:IBE_IBSD_udstyret_i_RR1.jpg|500x500px|thumb|IBE IBSD: positioned in cleanroom 1]] | ||