Specific Process Knowledge/Etch/DRIE-Pegasus/Notation: Difference between revisions
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== How to read the SPTS notation on process recipes == | == How to read the SPTS notation on process recipes == | ||
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To understand the SPTS short hand notation on process recipes look at two examples from the etch cycle of Step1 of the Process A shown in '''bold''' below: | To understand the SPTS short hand notation on process recipes look at two examples from the etch cycle of Step1 of the Process A shown in '''bold''' below: | ||
# The Platen power has the setting ''120 >> 140 (1.5s) 45 '' - it is to be interpreted as: | # The Platen power has the setting ''120 >> 140 (1.5s) 45 '' - it is to be interpreted as: | ||