Specific Process Knowledge/Thermal Process/Furnace Noble: Difference between revisions
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==Noble | ==Noble furnace== | ||
This furnace is used to grow oxide on metals or dirty wafers and to anneal wafers up to 1000 degree Celsius. | This furnace is used to grow oxide on metals or dirty wafers and to anneal wafers up to 1000 degree Celsius. | ||
The Noble | The Noble furnace is located in service room 3. | ||
[[Image:Noble.JPG|thumb|300x300px|A1 Bor Drive-in furnace. Positioned in cleanroom 2]] | [[Image:Noble.JPG|thumb|300x300px|A1 Bor Drive-in furnace. Positioned in cleanroom 2]] | ||
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'''The user manual, technical information and contact information can be found in LabManager:''' | '''The user manual, technical information and contact information can be found in LabManager:''' | ||
'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=150 | '''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=150 Noble furnace]''' | ||
==Overview of the performance of the Noble Furnace== | ==Overview of the performance of the Noble Furnace== | ||