Specific Process Knowledge/Thermal Process/BCB Curing Oven: Difference between revisions
| Line 56: | Line 56: | ||
*Resist (prebaked) | *Resist (prebaked) | ||
*III-V materials | *III-V materials | ||
*Metal | *Metal (only with carrier wafer) | ||
|- | |- | ||
|} | |} | ||
| Line 56: | Line 56: | ||
*Resist (prebaked) | *Resist (prebaked) | ||
*III-V materials | *III-V materials | ||
*Metal | *Metal (only with carrier wafer) | ||
|- | |- | ||
|} | |} | ||