Jump to content

Specific Process Knowledge/Thermal Process/BCB Curing Oven: Difference between revisions

← Older editNewer edit →
VisualWikitext
Line 5: Line 5:
The BCB Curing Oven is mainly used for curing of BCB (bisbenzocyclobutene) and for alloying of metal in a nitrogen atmosphere.
The BCB Curing Oven is mainly used for curing of BCB (bisbenzocyclobutene) and for alloying of metal in a nitrogen atmosphere.


During processing the furnace is rapidly heated by use of five halogen lamps below the sample. The furnace is purged with a controlable nitrogen flow. There is vacuum on the furnace.
During processing the furnace is rapidly heated by use of five halogen lamps below the sample. The furnace is purged with a high or a low nitrogen flow, and there is vacuum on the furnace.  


'''The user manual, user APV, technical information and contact information can be found in LabManager:'''
'''The user manual, user APV, technical information and contact information can be found in LabManager:'''
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Thermal_Process/BCB_Curing_Oven"