Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
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The 'workhorse' SEM that will cover most users needs is the [[/Leo|Leo SEM]]. It is a very reliable and rugged instrument that provides high quality images of most samples. Excellent images on a large variety of materials such as semiconductors, semiconductor oxides or nitrides, metals, thin films and some polymers may be acquired on the [[/Leo|Leo SEM]]. As such, we prefer that new users that have no prior SEM experience get trained on the Leo SEM before they start using the FEI or Zeiss. | The 'workhorse' SEM that will cover most users needs is the [[/Leo|Leo SEM]]. It is a very reliable and rugged instrument that provides high quality images of most samples. Excellent images on a large variety of materials such as semiconductors, semiconductor oxides or nitrides, metals, thin films and some polymers may be acquired on the [[/Leo|Leo SEM]]. As such, we prefer that new users that have no prior SEM experience get trained on the Leo SEM before they start using the FEI or Zeiss. | ||
The [[/Zeiss|Zeiss SEM]] is the newest SEM in the cleanroom. It's a state-of-the-art SEM that will produce excellent images on | The [[/Zeiss|Zeiss SEM]] is the newest SEM in the cleanroom. It's a state-of-the-art SEM that will produce excellent images on almost any sample. Operated by the same user interface as the Leo, it is quite straight forward to change between the two instruments. | ||
[[image:SEM-FEI-1.jpg|200x200px|right|thumb|The FEI SEM has its own dedicated room: Cleanroom 10]] | [[image:SEM-FEI-1.jpg|200x200px|right|thumb|The FEI SEM has its own dedicated room: Cleanroom 10]] | ||
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[[/Jeol|Jeol SEM]] | [[/Jeol|Jeol SEM]] | ||
Outside the cleanroom in the basement of building 347, the [[/Jeol|Jeol SEM]] provides a possibilty | Outside the cleanroom in the basement of building 347, the [[/Jeol|Jeol SEM]] provides a possibilty | ||
<gallery caption="The SEM's at Danchip" widths="250" heights="200" perrow=2" halign="right"> | |||
image:SEM-FEI-1.jpg| The FEI SEM | |||
</gallery> | |||