Specific Process Knowledge/Thermal Process/C1 Furnace Anneal-oxide: Difference between revisions
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http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/C1_Furnace_Anneal-oxide | |||
==C1 Anneal-oxide furnace== | ==C1 Anneal-oxide furnace== | ||
[[Image:C1.JPG|thumb|300x300px|C1 Anneal-oxide furnace. Positioned in cleanroom 2]] | [[Image:C1.JPG|thumb|300x300px|C1 Anneal-oxide furnace. Positioned in cleanroom 2]] | ||