Specific Process Knowledge/Characterization: Difference between revisions
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Revision as of 14:36, 5 April 2013
Choose characterization topic (to find which tool to use)
- Sample imaging
- Topographic measurement
- Stress measurement
- Measurement of film thickness and optical constants
- Wafer thickness measurement
- Element analysis
- Hydrophobicity measurement
- Resistivity measurement
- Scanning Electron Microscopy