Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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* Temperature range -20 to 30 degrees C | * Temperature range -20 to 30 degrees C | ||
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|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"|Process options | ||
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* Bosch processes | * Bosch processes with etch and dep cycles possibly split into three individually controllable parts | ||
* Parameter ramping during process steps | |||
* SOI option to reduce notching at buried | |||
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