Specific Process Knowledge/Characterization/Four-Point Probe: Difference between revisions

Revision as of 11:37, 29 November 2012

Four-Point Probe

The Four-Point Probe is a Veeco FPP-5000 for I/V measurement. The main purpose it to measure resistance and resistivity on a 4" silicon wafer. But can also be used to find thickness of thin layers or test if is a N- or P-type wafer.

The wafer are pushed down on the four pins so a measurement is performed. It works only for 4" wafers because a special holder is need.

The user manual,technical information and contact information can be found in LabManager:

Four point probe

Overview of the performance of the Four-Point Probe and some process related parameters

Purpose		Resistance and resistivity measurement
Performance
Process parameter range	Process Temperature	room temperature
Process parameter range	Process pressure	1 atm
Substrates	Batch size	1 4" wafer per measurement
Substrates	Substrate material allowed	Silicon wafers

@@ Line 39: / Line 39: @@
 | style="background:LightGrey; color:black"|Substrate material allowed
 |style="background:WhiteSmoke; color:black"|
-*Silicon wafers (new from the box or RCA cleaned)
+*Silicon wafers
 |-
 |}