Specific Process Knowledge/Characterization/Four-Point Probe: Difference between revisions

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==4-Point Probe==
==Four-Point Probe==


The 4-Point Probe is used to make I/V measurement for resistance and resistivity measurement. But can also be used to find thickness of thin layers or test if is a N- or P-type wafer.  
The four-Point Probe is used to make I/V measurement for resistance and resistivity measurement. But can also be used to find thickness of thin layers or test if is a N- or P-type wafer.  


The four pins are pushed on the surface and a measurement is performed.  
The four pins are pushed on the surface and a measurement is performed. It works only for 4" wafers because a special holder is need.  
[[Image:4pointprobe.jpg|thumb|300x300px|Four point probe: positioned in cleanroom 4]]
[[Image:4pointprobe.jpg|thumb|300x300px|Four point probe: positioned in cleanroom 4]]



Revision as of 10:02, 29 November 2012

Four-Point Probe

The four-Point Probe is used to make I/V measurement for resistance and resistivity measurement. But can also be used to find thickness of thin layers or test if is a N- or P-type wafer.

The four pins are pushed on the surface and a measurement is performed. It works only for 4" wafers because a special holder is need.

Four point probe: positioned in cleanroom 4

The user manual,technical information and contact information can be found in LabManager:

Four point probe