Specific Process Knowledge/Characterization/Four-Point Probe: Difference between revisions
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The 4-Point Probe is used to make I/V measurement for resistance and resistivity measurement. But can also be used to find thickness of thin layers or test if is a N- or P-type wafer. | The 4-Point Probe is used to make I/V measurement for resistance and resistivity measurement. But can also be used to find thickness of thin layers or test if is a N- or P-type wafer. | ||
The four pins are pushed on the surface and a measurement is performed. | |||
[[Image:4pointprobe.jpg|thumb|300x300px|Four point probe: positioned in cleanroom 4]] | [[Image:4pointprobe.jpg|thumb|300x300px|Four point probe: positioned in cleanroom 4]] | ||