Specific Process Knowledge/Thermal Process/A3 Phosphor Drive-in furnace: Difference between revisions

Revision as of 09:54, 29 November 2012 view source Pvl (talk \| contribs) Bureaucrats, danchip, Administrators 516 edits →A3 Furnace Phosphorus drive-in ← Older edit		Revision as of 09:54, 29 November 2012 view source Pvl (talk \| contribs) Bureaucrats, danchip, Administrators 516 edits →A3 Furnace Phosphorus drive-in Newer edit →
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	A3 is the third furnace tube in the A-stack positioned in cleanroom 2. The A-stack together with the C2 Furnace Gate oxide are the cleanest of all furnaces in the cleanroom. Please be aware of which substrates are allowed to enter this furnace. Check the [http://www.labmanager.danchip.dtu.dk/view_binary.php?fileId=1250 cross contamination chart].		A3 is the third furnace tube in the A-stack positioned in cleanroom 2. The A-stack together with the C2 Furnace Gate oxide are the cleanest of all furnaces in the cleanroom. Please be aware of which substrates are allowed to enter this furnace. Check the [http://www.labmanager.danchip.dtu.dk/view_binary.php?fileId=1250 cross contamination chart].


	'''The user manual, quality control procedure and results, technical information and contact information can be found in LabManager:'''		'''The user manual, quality control procedure and results, technical information and contact information can be found in LabManager:'''