Specific Process Knowledge/Characterization/Four-Point Probe: Difference between revisions
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The 4-Point Probe is used to make I/V measurement for resistance and resistivity measurement. But can also be used to find thickness of thin layers or test if is a N- or P-type wafer. | The 4-Point Probe is used to make I/V measurement for resistance and resistivity measurement. But can also be used to find thickness of thin layers or test if is a N- or P-type wafer. | ||
[[Image:4pointprobe.jpg|thumb|300x300px|Four point probe: positioned in cleanroom 4]] | [[Image:4pointprobe.jpg|thumb|300x300px|Four point probe: positioned in cleanroom 4]] | ||
'''The user manual, quality control procedure and results, technical information and contact information can be found in LabManager:''' | |||
'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=163 Four point probe]''' | |||
Revision as of 16:13, 28 November 2012
4-Point Probe
The 4-Point Probe is used to make I/V measurement for resistance and resistivity measurement. But can also be used to find thickness of thin layers or test if is a N- or P-type wafer.
The user manual, quality control procedure and results, technical information and contact information can be found in LabManager: