Specific Process Knowledge/Characterization/Four-Point Probe: Difference between revisions
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The 4-Point Probe is used to make I/V measurement for resistance and resistivity measurement. But can also be used to find thickness of | The 4-Point Probe is used to make I/V measurement for resistance and resistivity measurement. But can also be used to find thickness of thin layers or test if is a N- or P-type wafer. |
Revision as of 16:08, 28 November 2012
4-Point Probe
The 4-Point Probe is used to make I/V measurement for resistance and resistivity measurement. But can also be used to find thickness of thin layers or test if is a N- or P-type wafer.