Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions

Revision as of 21:20, 22 November 2007 view source Jml (talk \| contribs) Bureaucrats, danchip, Administrators 1,918 edits No edit summary ← Older edit		Revision as of 17:13, 24 November 2007 view source Jml (talk \| contribs) Bureaucrats, danchip, Administrators 1,918 edits No edit summary Newer edit →
Line 1:		Line 1:
	At the moment we have three SEM's.		At the moment we have three SEM's. Together they cover a wide range of needs in the cleanroom: From the fast in-process verification of different process parameters such as etch rates, step coverages or lift-off quality to the ultra high resolution images on any type of sample intended for publication.

	===[[/FEI \| FEI SEM]] - ''FEI Nova 600 NanoSEM''===		===[[/FEI \| FEI SEM]] - ''FEI Nova 600 NanoSEM''===