Specific Process Knowledge/Thin film deposition/Furnace LPCVD PolySilicon: Difference between revisions
| Line 10: | Line 10: | ||
To get a training on the furnace please contact training@danchip.dtu.dk. | To get a training on the furnace please contact training@danchip.dtu.dk. | ||
Information on how to operate the furnaces please read the user manuals which are uploaded to the machine pages in LabManager or consult the Furnace group at Danchip (furnace@danchip.dtu.dk). | Information on how to operate the furnaces please read the user manuals which are uploaded to the machine pages in LabManager or consult the Furnace group at Danchip (furnace@danchip.dtu.dk). | ||
'''The user manual(s), quality control procedure(s) and results, technical information and contact information can be found in LabManager:''' | |||
'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=86 Furnace: LPCVD Poly 4" (B4)]''' | |||
'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=291 Furnace: LPCVD Poly 6" (B4)]''' | |||
==Process Knowledge== | ==Process Knowledge== | ||