Specific Process Knowledge/Thermal Process/Jipelec RTP: Difference between revisions
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==Overview of the performance of the Jipelec RTP and some process related parameters== | ==Overview of the performance of the Jipelec RTP and some process related parameters== | ||
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!style="background:silver; color:black;" align="center"|Purpose | !style="background:silver; color:black;" align="center"|Purpose | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"|RTP annealing | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Process parameter range | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Process parameter range | ||