Specific Process Knowledge/Etch/DRIE-Pegasus/Notation: Difference between revisions
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== How to read the SPTS notation on process recipes == | == How to read the SPTS notation on process recipes == | ||
To understand the SPTS short hand notation on process recipes look at two examples from the etch cycle of | To understand the SPTS short hand notation on process recipes look at two examples from the etch cycle of Step1 of the Process A shown in '''bold''' below: | ||
# The Platen power has the setting ''120 >> 140 (1.5s) 45 '' - it is to be interpreted as: | # The Platen power has the setting ''120 >> 140 (1.5s) 45 '' - it is to be interpreted as: | ||
## In the first 1.5 seconds of the every cycle the platen power has a value that is ramped (indicated by >>) from 120 W initially to 150 W in the end | ## In the first 1.5 seconds of the every cycle the platen power has a value that is ramped (indicated by >>) from 120 W initially to 150 W in the end | ||
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|- | |- | ||
! Pressure (mtorr) | ! Pressure (mtorr) | ||
| 25 (1.5 s) 90 >> 150 | | '''25 (1.5 s) 90 >> 150''' | ||
| 25 | | 25 | ||
| 25 (1.5 s) 150 | | 25 (1.5 s) 150 | ||
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|- | |- | ||
! Platen power (W) | ! Platen power (W) | ||
| 120 >> 140 (1.5) 45 | | '''120 >> 140 (1.5) 45''' | ||
| 0 | | 0 | ||
| 140 (1.5) 45 | | 140 (1.5) 45 | ||