Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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[[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Waferloading|here]]. | [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Waferloading|here]]. | ||
The instrument was opened for users in April 2010 when the acceptance test was signed. This was based on the performance of five standard recipes (A, B, C, D and SOI). The acceptance test report is found [[Media:Pegasus_AcceptanceTest.pdf|here]]. | |||
== Process information == | == Process information == | ||