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Specific Process Knowledge/Etch/ASE (Advanced Silicon Etch): Difference between revisions

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{| border="1" cellspacing="1" cellpadding="2"  align="left"
{| border="1" cellspacing="1" cellpadding="2"  align="left"
|+'''Shallolr'''
|-
! Recipe:
! Recipe:
! Shallolr
! Shallolr
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!Passivation cycle
!Passivation cycle
|-
|-
|}
{| border="1" cellpadding="5" cellspacing="0" align="center"
|+'''Shallolr'''
|-
! style="background:#efefef;" | First header
! colspan="2" style="background:#ffdead;" | Second header
|-
| upper left
|  
| rowspan=2 style="border-bottom:3px solid grey;" valign="top" |right side
|-
| style="border-bottom:3px solid grey;" | lower left
| style="border-bottom:3px solid grey;" | lower middle
|-
| colspan="3" align="center" |
{| border="0"
|+''A table in a table''
|-
%| align="center" width="150px" | [[Image:Wiki.png]]
%| align="center" width="150px" | [[Image:Wiki.png]]
|-
| align="center" colspan="2" style="border-top:1px solid red; border-right:1px
          solid red; border-bottom:2px solid red; border-left:1px solid red;" |
Two Wikimedia logos
|}
|}
|}