Specific Process Knowledge/Thin film deposition/Deposition of Palladium: Difference between revisions
New page: Palladium can be deposited by e-beam evaporation. In the chart below you can compare the different deposition equipment. {| border="1" cellspacing="0" cellpadding="4" ! ! E-beam evapor... |
No edit summary |
||
| Line 4: | Line 4: | ||
{| border="1" cellspacing="0" cellpadding="4" | {| border="1" cellspacing="0" cellpadding="4" | ||
! | ! | ||
! E-beam evaporation (Alcatel) | ! E-beam evaporation ([[Specific Process Knowledge/Thin film deposition/Alcatel|Alcatel]]) | ||
! E-beam evaporation (Leybold) | ! E-beam evaporation ([[Specific Process Knowledge/Thin film deposition/Leybold|Leybold]]) | ||
|- | |- | ||
| Batch size | | Batch size | ||