Specific Process Knowledge/Thin film deposition/Deposition of Copper: Difference between revisions
New page: Copper can be deposited by e-beam evaporation. In the chart below you can compare the different deposition equipment. {| border="1" cellspacing="0" cellpadding="3" ! ! E-beam evaporati... |
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== Studies of Cu deposition processes == | |||
[[/Deposition of Copper|Roughness of Cu layers]] - ''Roughness of Cu layers deposited with Alcatel'' | |||