Specific Process Knowledge/Thin film deposition/Deposition of Titanium: Difference between revisions
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New page: Titanium can be deposited by e-beam evaporation. In the chart below you can compare the different deposition equipment. {| border="1" cellspacing="0" cellpadding="4" ! ! E-beam evapora... |
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| Line 27: | Line 27: | ||
| Layer thickness | | Layer thickness | ||
|10Å to 1µm | |10Å to 1µm | ||
|10Å to | |10Å to 0.5µm | ||
|10Å to 1 µm | |10Å to 1 µm | ||
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