Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions
| Line 103: | Line 103: | ||
**Dual - bottom up | **Dual - bottom up | ||
***top: 8µm | ***top: 8µm | ||
***Gap: 91µm (the trench depth) | ***Gap: 91µm (<- choose the trench depth) | ||
***Bottom: 8µm | ***Bottom: 8µm | ||
**Speed factor: 1x | **Speed factor: 1x | ||