Specific Process Knowledge/Thermal Process/A3 Phosphor Drive-in furnace: Difference between revisions
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==Process knowledge== | ==Process knowledge== | ||
*Phosphorus drive-in: look at the [[Process Knowledge/Thermal Process/Dope with Phosphorus|Dope with Phosphorus]] page | *Phosphorus drive-in: look at the [[Specific Process Knowledge/Thermal Process/Dope with Phosphorus|Dope with Phosphorus]] page | ||
*Oxidation: look at the [[Specific Process Knowledge/Thermal Process/Oxidation|Oxidation]] page | *Oxidation: look at the [[Specific Process Knowledge/Thermal Process/Oxidation|Oxidation]] page | ||
*Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing|Annealing]] page | *Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing|Annealing]] page | ||
==Overview of the performance of the phosphorus drive-in furnace and some process related parameters== | ==Overview of the performance of the phosphorus drive-in furnace and some process related parameters== | ||