Specific Process Knowledge/Thermal Process/A1 Bor Drive-in furnace: Difference between revisions
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*O<sub>2</sub>,H<sub> | *O<sub>2</sub>,H<sub>2</sub> and N<sub>2</sub> | ||
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!style="background:silver; color:black" align="left" valign="top" rowspan="2"|Substrates | !style="background:silver; color:black" align="left" valign="top" rowspan="2"|Substrates | ||