Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE magnetic stack etch: Difference between revisions

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 [[image:IBE magnetic stack A19-13.jpg|300x300px|thumb|center|Magnetic stack of Ta/MnIr/NiFe/Ta/Tao/Ta/MnIr/NiFe/Ta etched with the optimal parameters shown above. Redeposition of etched material at photo resist. Profile ~78°]]
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-[[image:IBE magnetic stack A16-13.jpg|300x300px|thumb|center|Etched magnetic stack with pool structure transfer, the parameters chosen was clearly not optimal. Chosen etch parameters result in severe footing]]
+[[image:IBE magnetic stack A16-13.jpg|300x300px|thumb|center|Etched magnetic stack with poor structure transfer, the parameters chosen was clearly not optimal. Chosen etch parameters result in severe footing]]
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-[[image:IBE magnetic stack A3-13.jpg|300x300px|thumb|center|Etched magnetic stack with pool structure transfer, the parameters chosen was clearly not optimal. Chosen etch parameters result in severe trenching]]
+[[image:IBE magnetic stack A3-13.jpg|300x300px|thumb|center|Etched magnetic stack with poor structure transfer, the parameters chosen was clearly not optimal. Chosen etch parameters result in severe trenching]]
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