Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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==Dektak 8 stylus profiler== | ==Dektak 8 stylus profiler== | ||
[[image: | [[image:Dektak 8 new position.JPG|275x275px|right|thumb|Dektak 8: positioned in Hymite room (characterization room).]] | ||
Dektak 8 stylus profiler is a product of Veeco Instruments. It is usable for profiling surfaces of samples with structures in the micrometer range. It can measure in a specific point found with help from high magnification video cameras or it can be programmed to measure several points defined with respect to some deskew points. It can also be used for stress measurements of thin films by measuring the wafer bow. | Dektak 8 stylus profiler is a product of Veeco Instruments. It is usable for profiling surfaces of samples with structures in the micrometer range. It can measure in a specific point found with help from high magnification video cameras or it can be programmed to measure several points defined with respect to some deskew points. It can also be used for stress measurements of thin films by measuring the wafer bow. | ||
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==Optical Profiler (Sensofar)== | ==Optical Profiler (Sensofar)== | ||