Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
| Line 47: | Line 47: | ||
|'''Resolution xy''' | |'''Resolution xy''' | ||
|down to 0.067 µm | |down to 0.067 µm | ||
|down to | |down to 0.003 µm | ||
|Depending on the objective: | |Depending on the objective: | ||
*0.5µm -> 5µm | *0.5µm -> 5µm | ||