Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
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|'''Max. scan range xy''' | |'''Max. scan range xy''' | ||
|Line scan x: 50µm to 200mm | |Line scan x: 50µm to 200mm | ||
|Line scan x: 50µm to | |Line scan x: 50µm to 55mm in one scan. Maximum scan lenght with stiching 200mm. | ||
|Depending on the objective: | |Depending on the objective: | ||
*One view: 127µmX95µm to 1270µmX955µm | *One view: 127µmX95µm to 1270µmX955µm | ||