Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
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![[Specific Process Knowledge/Characterization/Profiler#Dektak_8_stylus_profiler|Dektak 8 stylus profiler]] | ![[Specific Process Knowledge/Characterization/Profiler#Dektak_8_stylus_profiler|Dektak 8 stylus profiler]] | ||
![[Specific Process Knowledge/Characterization/Profiler# | ![[Specific Process Knowledge/Characterization/Profiler#Dektak XTA_new_stylus_profiler|Dektak XTA_new stylus profiler]] | ||
![[Specific Process Knowledge/Characterization/Profiler#Optical_Profiler_(Sensofar)|Optical Profiler (Sensofar)]] | ![[Specific Process Knowledge/Characterization/Profiler#Optical_Profiler_(Sensofar)|Optical Profiler (Sensofar)]] | ||
![[Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy|Nanoman]] | ![[Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy|Nanoman]] | ||
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|'''Max. scan range xy''' | |'''Max. scan range xy''' | ||
|Line scan x: 50µm to 200mm | |Line scan x: 50µm to 200mm | ||
|Line scan x: 50µm to | |Line scan x: 50µm to xxx mm | ||
|Depending on the objective: | |Depending on the objective: | ||
*One view: 127µmX95µm to 1270µmX955µm | *One view: 127µmX95µm to 1270µmX955µm | ||
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|'''Resolution z''' | |'''Resolution z''' | ||
|1Å, 10Å or 20Å | |1Å, 10Å or 20Å | ||
| | |XXXÅ, XXXÅ or XXXÅ | ||
|Depending on measuring methode: | |Depending on measuring methode: | ||
*PSI down to 0.01 nm | *PSI down to 0.01 nm | ||