Specific Process Knowledge/Characterization/Profiler: Difference between revisions
| Line 138: | Line 138: | ||
!style="background:silver; color:black" align="left"|Performance | !style="background:silver; color:black" align="left"|Performance | ||
|style="background:LightGrey; color:black"|Scan range xy||style="background:WhiteSmoke; color:black"| | |style="background:LightGrey; color:black"|Scan range xy||style="background:WhiteSmoke; color:black"| | ||
Line scan x: 50 µm to | Line scan x: 50 µm to 55 mm in a single scan, up to 200 mm with stiching | ||
|- | |- | ||
|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||