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Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide: Difference between revisions

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! LPCVD (TEOS)
! LPCVD (TEOS)
! PECVD
! PECVD
! Sputter technique (PVD co-sputter/evaporation)
! Sputter technique [[Specific Process Knowledge/Thin film deposition/Deposition of Silicon oxide in PVD co-sputter/evaporation|(PVD co-sputter/evaporation tool)]]
 
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| Stoichiometry
| Stoichiometry
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