Specific Process Knowledge/Thin film deposition/Deposition of Aluminium: Difference between revisions
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| Deposition rate | | Deposition rate | ||
|2Å/s to 15Å/s | |2Å/s to 15Å/s | ||
| | |1Å/s to 5Å/s | ||
| | |10Å/s to 15Å/s | ||
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