LabAdviser: Difference between revisions
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*'''[[/Process flow approval|Process flow approval]]''' | *'''[[/Process flow approval|Process flow approval]]''' | ||
*'''[[Specific Process Knowledge]]''' | *'''[[Specific Process Knowledge]]''' | ||
**[[Specific Process Knowledge/Back-end processing|Back-end processing]] | |||
**[[Specific Process Knowledge/Bonding|Bonding]] | |||
**[[Specific Process Knowledge/Characterization|Characterization]] | |||
**[[Specific Process Knowledge/E-beam lithography|E-beam lithography]] | |||
**[[Specific Process Knowledge/Etch|Etch]] | |||
**[[Specific Process Knowledge/Imprinting|Imprinting]] | |||
**[[Specific Process Knowledge/Photolithography|Photolithography]] | **[[Specific Process Knowledge/Photolithography|Photolithography]] | ||
**[[Specific Process Knowledge/Thermal Process|Thermal process]] | |||
**[[Specific Process Knowledge/Thin film deposition|Thin film deposition]] | **[[Specific Process Knowledge/Thin film deposition|Thin film deposition]] | ||
**[[Specific Process Knowledge/ | **[[Specific Process Knowledge/Wafer and sample drying|Wafer and sample drying]] | ||
**[[Specific Process Knowledge/Wafer cleaning|Wafer cleaning]] | **[[Specific Process Knowledge/Wafer cleaning|Wafer cleaning]] | ||
**[[Specific Process Knowledge/Wafer | **[[Specific Process Knowledge/Wafer Information|Wafer Information]] | ||
**[[Specific Process Knowledge/III-V Process|III-V Processes]] | **[[Specific Process Knowledge/III-V Process|III-V Processes]] | ||
*'''[[Substrates]]''' | *'''[[Substrates]]''' | ||
*'''[[New equipment in the pipeline]]''' | *'''[[New equipment in the pipeline]]''' | ||
Revision as of 07:20, 19 October 2012
LabAdviser is a process handbook for equipment and processes at the DTU Danchip cleanroom facilities. The function and capacity of each piece of equipment is described in detail and general process steps, eg photolithography procedures, are clarified. LabAdviser is meant to advise you to a good starting point for your cleanroom process for further optimization to meet your needs. To enter LabAdviser you need to log in. LabAdviser is only editable for Danchip employees. If you need further information about certain machinery or processes, please contact the Danchip personnel.
Contents
- Danchip contact information
- Process flow approval
- Specific Process Knowledge
- Substrates
- New equipment in the pipeline
- Old equipment for decommissioning
- Surveys and statistics