Specific Process Knowledge/Thin film deposition/Furnace LPCVD PolySilicon: Difference between revisions
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To get a training on the furnace please contact training@danchip.dtu.dk. | To get a training on the furnace please contact training@danchip.dtu.dk. | ||
Information on how to operate the furnaces please read the user manuals which are uploaded to the machine pages in LabManager or consult the Furnace group at Danchip (furnace@danchip.dtu.dk). | |||
==Process Knowledge== | ==Process Knowledge== | ||