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Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions

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2,908 edits
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| [[#Results of acceptance test no. 7|7]]||Free standing structure||Measure bow due to stress of a membrane.||Membrane bow repeatability of 5 successive measurement within 2%
| [[#Results of acceptance test no. 7|7]]||Free standing structure||Measure bow due to stress of a membrane. <br/> Membrane material: Si(2 µm)/SiO2(~1 µm)/Au(50 nm) <br/> Membrane size: honey comb structure approximately 150 µm in diameter <br/> Bow < 500 nm ||Membrane bow repeatability of 5 successive measurement within 2%
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| [[#Results of acceptance test no. 8|8]]||Stitching of large area||Stitching 4 mm x 4 mm on same sample as in 7. The area consists of many closed packed honey comb formed membranes.||Membrane bow must the same as on 7 within 2%
| [[#Results of acceptance test no. 8|8]]||Stitching of large area||Stitching 4 mm x 4 mm on same sample as in 7. The area consists of many closed packed honey comb formed membranes.||Membrane bow must the same as on 7 within 2%
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