Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions
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| ||||Measure thickness of AZ-resist on pillars of 50 µm in diameter|| | | ||||Measure thickness of AZ-resist on pillars of 50 µm in diameter|| | ||
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| 13||Roughness repeatability||Sample material: Si wafer with poly-silicon layer.||Repeatability within 0.2% | | [[#Results of acceptance test no. 13|13]]||Roughness repeatability||Sample material: Si wafer with poly-silicon layer.||Repeatability within 0.2% | ||
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| ||||3 successive measurements of the roughness || | | ||||3 successive measurements of the roughness || | ||