Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions
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| ||||Bow < 500 nm|| | | ||||Bow < 500 nm|| | ||
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| 8||Stitching of large area||Stitching 4 mm x 4 mm on same sample as in 7. The area consists of many closed packed honey comb formed membranes.||Membrane bow must the same as on 7 within 2% | | [[#Results of acceptance test no. 8|8]]||Stitching of large area||Stitching 4 mm x 4 mm on same sample as in 7. The area consists of many closed packed honey comb formed membranes.||Membrane bow must the same as on 7 within 2% | ||
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| 9||Narrow trenches and holes ||Sample material: Patterned silicon substrate.||Depth 20±2 µm | | 9||Narrow trenches and holes ||Sample material: Patterned silicon substrate.||Depth 20±2 µm | ||