Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions
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Measurement: Narrow trench depth | Measurement: Narrow trench depth | ||
Acceptance criteria: 20±2µm | Acceptance criteria: 20±2µm, see the SEM images here: | ||
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[[image:Sensofar_A9_SEM.jpg|100x100px|thumb|center|SEM profile image of structure]] | |||
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[[Media:Sensofar_A9_narrow_trench.pdf|Sensofar A9 result ]] | [[Media:Sensofar_A9_narrow_trench.pdf|Sensofar A9 result ]] | ||
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==Results of acceptance test no. 10== | ==Results of acceptance test no. 10== | ||