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Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions

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==Results of acceptance test no. 13==
==Results of acceptance test no. 13==
Sample: Si wafer with poly-silicon layer
Measurement: Roughness repeatability, 3 successive measurements of the roughness
Acceptance criteria: Repeatability within 0.2%
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